| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Lezec, Henri J. | en_US |
| dc.contributor.author | Shepard, Mark I. | en_US |
| dc.contributor.author | Musil, Christian R. | en_US |
| dc.contributor.author | Murguia, James E. | en_US |
| dc.contributor.author | Zamani, Susan | en_US |
| dc.contributor.author | Ismail, Khalid | en_US |
| dc.contributor.author | Mahoney, Leonard J. | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Ro, Jaesang | en_US |
| dc.contributor.author | Blauner, Patricia G. | en_US |
| dc.contributor.author | Butt, Yousaf | en_US |
| dc.contributor.author | Thompson, Carl V., III | en_US |
| dc.contributor.author | Dubner, Andrew D. | en_US |
| dc.contributor.author | Wagner, Alan | en_US |
| dc.contributor.author | Herndon, Terry O. | en_US |
| dc.date.accessioned | 2010-07-16T04:03:11Z | |
| dc.date.available | 2010-07-16T04:03:11Z | |
| dc.date.issued | 1988-01-01 to 1988-12-31 | en_US |
| dc.identifier | RLE_PR_131_01_01s_03 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57076 | |
| dc.description | Contains reports on eight research projects. | en_US |
| dc.description.sponsorship | DARPA/Naval Electronics Systems Command (Contract MDA 903-85-C-0215) | en_US |
| dc.description.sponsorship | DARPA/U.S. Army Research Office (Contract DAAL03-88-K-0108) | en_US |
| dc.description.sponsorship | U.S. Army Research Office (Contract DAAL03-87-K-0126) | en_US |
| dc.description.sponsorship | Charles Stark Draper Laboratory | en_US |
| dc.description.sponsorship | International Business Machines Corporation - Research Division, General Technologies Division | en_US |
| dc.description.sponsorship | U.S. Air Force | en_US |
| dc.description.sponsorship | DARPA | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1988 | en_US |
| dc.relation.ispartof | Solid State Physics, Electronics And Optics | en_US |
| dc.relation.ispartof | Materials and Fabrication | en_US |
| dc.relation.ispartof | Focused Ion Beam Fabrication | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 131 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Focused Ion Beam Fabrication | en_US |
| dc.subject.other | Focused Ion Beam Program | en_US |
| dc.subject.other | Development of Focused Ion Beam Lithography | en_US |
| dc.subject.other | Development of Focused Ion Beam Patterning | en_US |
| dc.subject.other | Frequency Tunable Gunn Diodes Fabricated by Focused Ion Beam Implantation | en_US |
| dc.subject.other | Field-Effect Transistors with Focused Ion Beam Implanted Channel Regions | en_US |
| dc.subject.other | Microstructure of Gold Films Produced by Ion Induced Deposition | en_US |
| dc.subject.other | Properties of Gold Films Produced by Ion Induced Deposition | en_US |
| dc.subject.other | Focused Ion Beam Induced Depostion of Submicrometer Structures | en_US |
| dc.subject.other | In-Situ Measurement of Gas Adsorption | en_US |
| dc.subject.other | In-Situ Measurement of Ion Induced Deposition | en_US |
| dc.subject.other | Planar Vias through Si₃N₄ and SiO₂ Fabricated by Focused Ion Beam Implantation | en_US |
| dc.title | Focused Ion Beam Fabrication | en_US |
| dc.type | Technical Report | en_US |
