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Microstructural Evolution in Thin Films of Electronic Materials

Research and Teaching Output of the MIT Community

Show simple item record Thompson, Carl V. en_US Liu, Yachin en_US Floro, Jerrold A. en_US Inglefield, Heather E. en_US Frost, Harold J. en_US Evans, Paul en_US Smith, David A. en_US Ma, En en_US Miura, H. en_US Tu, King-Ning en_US Cho, Jaeshin en_US Kahn, Harold en_US Longworth, Hai P. en_US Melngailis, John en_US Dubner, Andrew D. en_US Ro, Jaesang en_US Edell, David J. en_US 2010-07-16T04:21:25Z 2010-07-16T04:21:25Z 1990-01-01 to 1990-12-31 en_US
dc.identifier RLE_PR_133_01_01s_02 en_US
dc.description Contains reports on eight research projects and a list of publications. en_US
dc.description.sponsorship National Science Foundation en_US
dc.description.sponsorship U.S. Air Force - Office of Scientific Research en_US
dc.description.sponsorship Joint Services Electronics Program Contract DAAL03-89-C-0001 en_US
dc.description.sponsorship IBM Corporation en_US
dc.description.sponsorship Hitachi Corporation en_US
dc.description.sponsorship Semiconductor Research Corporation en_US
dc.description.sponsorship National Institutes of Health en_US
dc.language.iso en en_US
dc.publisher Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) en_US
dc.relation.ispartof Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1990 en_US
dc.relation.ispartof Solid State Physics, Electronics and Optics en_US
dc.relation.ispartof Materials and Fabrication en_US
dc.relation.ispartof Microstructural Evolution in Thin Films of Electronic Materials en_US
dc.relation.ispartofseries Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 133 en_US
dc.rights Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. en_US
dc.subject.other Microstructural Evolution in Thin Films of Electronic Materials en_US
dc.subject.other Coarsening of Particles on a Planar Substrate en_US
dc.subject.other Epitaxial Grain Growth en_US
dc.subject.other Modeling of Microstructural Evolution in Thin Films en_US
dc.subject.other Properties of Grain Boundaries in Zone Melted Silicon Thin Films en_US
dc.subject.other Kinetics of Thin Film Silicide Form ation en_US
dc.subject.other Reliability of Interconnects en_US
dc.subject.other Microstructures of Interconnects en_US
dc.subject.other Focused Ion Beam Induced Deposition en_US
dc.subject.other Protective Coatings for Integrated Circuits in an in vitro Environment en_US
dc.subject.other Publications en_US
dc.title Microstructural Evolution in Thin Films of Electronic Materials en_US
dc.type Technical Report en_US

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