| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Liu, Yachin | en_US |
| dc.contributor.author | Floro, Jerrold A. | en_US |
| dc.contributor.author | Inglefield, Heather E. | en_US |
| dc.contributor.author | Frost, Harold J. | en_US |
| dc.contributor.author | Evans, Paul | en_US |
| dc.contributor.author | Smith, David A. | en_US |
| dc.contributor.author | Ma, En | en_US |
| dc.contributor.author | Miura, H. | en_US |
| dc.contributor.author | Tu, King-Ning | en_US |
| dc.contributor.author | Cho, Jaeshin | en_US |
| dc.contributor.author | Kahn, Harold | en_US |
| dc.contributor.author | Longworth, Hai P. | en_US |
| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Dubner, Andrew D. | en_US |
| dc.contributor.author | Ro, Jaesang | en_US |
| dc.contributor.author | Edell, David J. | en_US |
| dc.date.accessioned | 2010-07-16T04:21:25Z | |
| dc.date.available | 2010-07-16T04:21:25Z | |
| dc.date.issued | 1990-01-01 to 1990-12-31 | en_US |
| dc.identifier | RLE_PR_133_01_01s_02 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57156 | |
| dc.description | Contains reports on eight research projects and a list of publications. | en_US |
| dc.description.sponsorship | National Science Foundation | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research | en_US |
| dc.description.sponsorship | Joint Services Electronics Program Contract DAAL03-89-C-0001 | en_US |
| dc.description.sponsorship | IBM Corporation | en_US |
| dc.description.sponsorship | Hitachi Corporation | en_US |
| dc.description.sponsorship | Semiconductor Research Corporation | en_US |
| dc.description.sponsorship | National Institutes of Health | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1990 | en_US |
| dc.relation.ispartof | Solid State Physics, Electronics and Optics | en_US |
| dc.relation.ispartof | Materials and Fabrication | en_US |
| dc.relation.ispartof | Microstructural Evolution in Thin Films of Electronic Materials | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 133 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Microstructural Evolution in Thin Films of Electronic Materials | en_US |
| dc.subject.other | Coarsening of Particles on a Planar Substrate | en_US |
| dc.subject.other | Epitaxial Grain Growth | en_US |
| dc.subject.other | Modeling of Microstructural Evolution in Thin Films | en_US |
| dc.subject.other | Properties of Grain Boundaries in Zone Melted Silicon Thin Films | en_US |
| dc.subject.other | Kinetics of Thin Film Silicide Form ation | en_US |
| dc.subject.other | Reliability of Interconnects | en_US |
| dc.subject.other | Microstructures of Interconnects | en_US |
| dc.subject.other | Focused Ion Beam Induced Deposition | en_US |
| dc.subject.other | Protective Coatings for Integrated Circuits in an in vitro Environment | en_US |
| dc.subject.other | Publications | en_US |
| dc.title | Microstructural Evolution in Thin Films of Electronic Materials | en_US |
| dc.type | Technical Report | en_US |
