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Microstructural Evolution in Thin Films of Electronic Materials

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dc.contributor.author Thompson, Carl V. en_US
dc.contributor.author Liu, Yachin en_US
dc.contributor.author Floro, Jerrold A. en_US
dc.contributor.author Inglefield, Heather E. en_US
dc.contributor.author Frost, Harold J. en_US
dc.contributor.author Evans, Paul en_US
dc.contributor.author Smith, David A. en_US
dc.contributor.author Ma, En en_US
dc.contributor.author Miura, H. en_US
dc.contributor.author Tu, King-Ning en_US
dc.contributor.author Cho, Jaeshin en_US
dc.contributor.author Kahn, Harold en_US
dc.contributor.author Longworth, Hai P. en_US
dc.contributor.author Melngailis, John en_US
dc.contributor.author Dubner, Andrew D. en_US
dc.contributor.author Ro, Jaesang en_US
dc.contributor.author Edell, David J. en_US
dc.date.accessioned 2010-07-16T04:21:25Z
dc.date.available 2010-07-16T04:21:25Z
dc.date.issued 1990-01-01 to 1990-12-31 en_US
dc.identifier RLE_PR_133_01_01s_02 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/57156
dc.description Contains reports on eight research projects and a list of publications. en_US
dc.description.sponsorship National Science Foundation en_US
dc.description.sponsorship U.S. Air Force - Office of Scientific Research en_US
dc.description.sponsorship Joint Services Electronics Program Contract DAAL03-89-C-0001 en_US
dc.description.sponsorship IBM Corporation en_US
dc.description.sponsorship Hitachi Corporation en_US
dc.description.sponsorship Semiconductor Research Corporation en_US
dc.description.sponsorship National Institutes of Health en_US
dc.language.iso en en_US
dc.publisher Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) en_US
dc.relation.ispartof Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1990 en_US
dc.relation.ispartof Solid State Physics, Electronics and Optics en_US
dc.relation.ispartof Materials and Fabrication en_US
dc.relation.ispartof Microstructural Evolution in Thin Films of Electronic Materials en_US
dc.relation.ispartofseries Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 133 en_US
dc.rights Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. en_US
dc.subject.other Microstructural Evolution in Thin Films of Electronic Materials en_US
dc.subject.other Coarsening of Particles on a Planar Substrate en_US
dc.subject.other Epitaxial Grain Growth en_US
dc.subject.other Modeling of Microstructural Evolution in Thin Films en_US
dc.subject.other Properties of Grain Boundaries in Zone Melted Silicon Thin Films en_US
dc.subject.other Kinetics of Thin Film Silicide Form ation en_US
dc.subject.other Reliability of Interconnects en_US
dc.subject.other Microstructures of Interconnects en_US
dc.subject.other Focused Ion Beam Induced Deposition en_US
dc.subject.other Protective Coatings for Integrated Circuits in an in vitro Environment en_US
dc.subject.other Publications en_US
dc.title Microstructural Evolution in Thin Films of Electronic Materials en_US
dc.type Technical Report en_US


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