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Submicron and Nanometer Structures Technology and Research

dc.contributor.authorSmith, Henry I.en_US
dc.contributor.authorBurkhardt, Martinen_US
dc.contributor.authorCarter, James M.en_US
dc.contributor.authorChu, Williamen_US
dc.contributor.authorEarly, Kathleen R.en_US
dc.contributor.authorGhanbari, Reza A.en_US
dc.contributor.authorHector, Scott D.en_US
dc.contributor.authorKu, Yao-Chingen_US
dc.contributor.authorMoel, Alberto M.en_US
dc.contributor.authorRittenhouse, George E.en_US
dc.contributor.authorSchattenburg, Mark L.en_US
dc.contributor.authorWong, Vincent V.en_US
dc.contributor.authorYen, Anthony T.en_US
dc.contributor.authorFerrera, Juanen_US
dc.contributor.authorMondol, Mark K.en_US
dc.contributor.authorNg, Lee-Pengen_US
dc.contributor.authorTsai, Flora S.en_US
dc.contributor.authorYunus, Sabahen_US
dc.contributor.authorAntoniadis, Dimitri A.en_US
dc.contributor.authorChung, James E.en_US
dc.contributor.authorFang, Haoen_US
dc.contributor.authorHu, Hangen_US
dc.contributor.authorSu, Lisa T-F.en_US
dc.contributor.authorKastner, Marc A.en_US
dc.contributor.authorKumar, Arvinden_US
dc.contributor.authorOrlando, Terry P.en_US
dc.contributor.authordel Alamo, Jesús A.en_US
dc.contributor.authorEugster, Cristopher C.en_US
dc.contributor.authorMoon, Euclid E.en_US
dc.contributor.authorShayegan, M.en_US
dc.contributor.authorTsui, Danielen_US
dc.contributor.authorZhao, Yangen_US
dc.contributor.authorChou, Michael T.en_US
dc.contributor.authorChoi, Woo-Youngen_US
dc.contributor.authorDamask, Jay N.en_US
dc.contributor.authorFonstad, Clifton G., Jr.en_US
dc.contributor.authorHaus, Hermann A.en_US
dc.contributor.authorKolodziejski, Leslie A.en_US
dc.contributor.authorWong, Vincent V.en_US
dc.contributor.authorGraybeal, John M.en_US
dc.contributor.authorMeyerson, Bernard S.en_US
dc.contributor.authorOlster, Daniel B.en_US
dc.contributor.authorCanizares, Claude R.en_US
dc.contributor.authorFleming, Robert C., Jr.en_US
dc.contributor.authorNenonen, Seppoen_US
dc.contributor.authorBristowe, Paul D.en_US
dc.contributor.authorCarel, Rolanden_US
dc.contributor.authorFloro, Jerrold A.en_US
dc.contributor.authorThompson, Carl V.en_US
dc.contributor.authorYee, Kennethen_US
dc.contributor.authorIsmail, Khaliden_US
dc.contributor.authorKaram, Nasseren_US
dc.date.accessioned2010-07-16T04:29:49Z
dc.date.available2010-07-16T04:29:49Z
dc.date.issued1991-01-01 to 1991-12-31en_US
dc.identifierRLE_PR_134_01_02s_04en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/57185
dc.descriptionContains reports on sixteen research projects and a list of publications.en_US
dc.description.sponsorshipJoint Services Electronics Program Contract DAAL03-89-C-0001en_US
dc.description.sponsorshipJoint Services Electronics Program Contract DAAL03-92-C-0001en_US
dc.description.sponsorshipNational Science Foundation Grant ECS 90-16437en_US
dc.description.sponsorshipSemiconductor Research Corporation Contract 90-SP-080en_US
dc.description.sponsorshipU.S. Navy - Naval Research Laboratory Contract N00014-90-K-2018en_US
dc.description.sponsorshipIBM Corporationen_US
dc.description.sponsorshipU.S. Air Force - Office of Scientific Research Grant F49620-92-J-0064en_US
dc.description.sponsorshipNational Science Foundation Grant DMR 87-19217en_US
dc.description.sponsorshipNational Science Foundation Grant DMR 90-22933en_US
dc.description.sponsorshipNational Aeronautics and Space Administration Contract NAS8-36748en_US
dc.description.sponsorshipNational Aeronautics and Space Administration Grant NAGW-2003en_US
dc.description.sponsorshipNational Science Foundation Grant DMR 90-01698en_US
dc.description.sponsorshipSpire Corporationen_US
dc.language.isoenen_US
dc.publisherResearch Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)en_US
dc.relation.ispartofMassachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1991en_US
dc.relation.ispartofSolid State Physics, Electronics and Opticsen_US
dc.relation.ispartofQuantum-Effect Devicesen_US
dc.relation.ispartofSubmicron and Nanometer Structures Technology and Researchen_US
dc.relation.ispartofseriesMassachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 134en_US
dc.rightsCopyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.en_US
dc.subject.otherSubmicron Structures Technologyen_US
dc.subject.otherSubmicron Structures Researchen_US
dc.subject.otherNanometer Structures Technologyen_US
dc.subject.otherNanometer Structures Researchen_US
dc.subject.otherSubmicron Structures Laboratoryen_US
dc.subject.otherMicrofabrication at Linewidths of 100 nm and Belowen_US
dc.subject.otherImproved Mask Technology for X-Ray Lithographyen_US
dc.subject.otherElectron Transport in Si MOSFETs with Deep-Submicron Channel Lengthsen_US
dc.subject.otherCoulomb Charging in Ultrasmall Semiconductor Devicesen_US
dc.subject.otherQuasi-One-Dimensional Wires in GaAs/AIGaAs Modulation Doped Field-Effect Transistorsen_US
dc.subject.otherSuperlattice Formation in GaAs/AIGaAs Modulation Doped Field-Effect Transistorsen_US
dc.subject.otherGaAs Electron Waveguide Devices Fabricated by X-Ray Lithographyen_US
dc.subject.otherArrays of Field-Effect-Induced Quantum Dotsen_US
dc.subject.otherPlanar-Resonant-Tunneling Field-Effect Transistors (PRESTFET)en_US
dc.subject.otherFabrication of Distributed-Feedback Lasersen_US
dc.subject.otherFabrication of Channel-Dropping Filtersen_US
dc.subject.otherNovel Superconducting Tunneling Structuresen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for X-Ray Spectroscopyen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for X-Ray Interferometryen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for Atom-Beam Spectroscopyen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for Atom-Beam Interferometryen_US
dc.subject.otherHigh-Dispersion, High Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopyen_US
dc.subject.otherSubmicron-Thickness X-Ray Window Technologyen_US
dc.subject.otherEpitaxy via Surface-Energy-Driven Grain Growthen_US
dc.subject.otherGaAs Epitaxy on Sawtooth-patterned Sien_US
dc.titleSubmicron and Nanometer Structures Technology and Researchen_US
dc.typeTechnical Reporten_US


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