A fundamental study of feature evolution during high density plasma etching
Author(s)
Lane, Jennifer M. (Jennifer Marie), 1977-
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Alternative title
Feature evolution during high density plasma etching
Other Contributors
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Advisor
Herbert H. Swain.
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Metadata
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Thesis (M.Eng. and S.B.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999. Includes bibliographical references (leaves 91-94).
Date issued
1999Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.