Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications
Author(s)
Labelle, Catherine B., 1972-
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Other Contributors
Massachusetts Institute of Technology. Department of Chemical Engineering.
Advisor
Karen K. Gleason.
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Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1999. Includes bibliographical references.
Date issued
1999Department
Massachusetts Institute of Technology. Department of Chemical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering.