| dc.contributor.advisor | Ernesto E. Blanco. | en_US |
| dc.contributor.author | Hashemi, Fardad Ali, 1976- | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Department of Mechanical Engineering. | en_US |
| dc.date.accessioned | 2014-09-09T17:51:41Z | |
| dc.date.available | 2014-09-09T17:51:41Z | |
| dc.date.copyright | 2000 | en_US |
| dc.date.issued | 2000 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/89285 | |
| dc.description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000. | en_US |
| dc.description | Includes bibliographical references (leaf 208). | en_US |
| dc.description.statementofresponsibility | by Fardad Ali Hashemi. | en_US |
| dc.format.extent | 208 leaves | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Mechanical Engineering. | en_US |
| dc.title | Design of a precision chemical mechanical planarization research system | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | S.M. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 46310295 | en_US |
