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Syllabus

Course Content

Theory of X-ray Spectrometry

  • Electron-specimen Interactions
    • Elastic Scattering: Electron Backscattering
    • Inelastic Scattering: Secondary Electron Excitation
      • Continuum X-ray Generation, Characteristic X-ray Generation

    • Interaction Volume

  • Matrix Corrections
    • Atomic Number, Absorption and Characteristic Fluorescence Corrections
    • Continuum Fluorescence Correction
    • Φ(ρz) Corrections

Instrumentation

  • Detectors Used in Electron Microprobe Analysis
    • Electron Detectors: Everhart-Thornley and Solid-state Diode Detectors
    • Cathodolumenescence Detectors
    • X-ray Detectors: Energy Dispersive and Wavelength Dispersive Spectrometers

Imaging Techniques

  • Topographic Imaging
  • Compositional Imaging with Wavelength Dispersive Spectrometry
  • Cathodolumenescence Imaging

Quantitative Analysis

  • Wavelength and Energy Dispersive Techniques
  • Background and Peak Overlap Corrections
  • Light Element Analysis
Recommended Textbook

Goldstein, J. I., D. E. Newbury, P. Echlin, D. C. Joy, A. D. Jr. Romig, C. E. Lyman, C. Fiori, and E. Lifshin. Scanning Electron Microscopy and X-ray Microanalysis: A Text for Biologists, Material Scientists, and Geologists (Second Edition). New York: Plenum Press, 1992.
   

Other Books

Reed, S. J. B. Electron Microprobe Analysis and Scanning Electron Microscopy in Geology. Cambridge, UK: Cambridge Univ. Press, 1996.

Scott, V. D., G. Love, and S. J. B. Reed. Quantitative Electron-Probe Microanalysis (Second Edition). New York: Ellis-Horwood, 1995.