Syllabus

Theory of X-ray Spectrometry

• Electron-specimen Interactions
  • Elastic Scattering: Electron Backscattering
  • Inelastic Scattering: Secondary Electron Excitation
    • Continuum X-ray Generation, Characteristic X-ray Generation
      
      
  • Interaction Volume
    
    
• Matrix Corrections
  • Atomic Number, Absorption and Characteristic Fluorescence Corrections
  • Continuum Fluorescence Correction
  • Φ(ρz) Corrections

Instrumentation

• Detectors Used in Electron Microprobe Analysis
  • Electron Detectors: Everhart-Thornley and Solid-state Diode Detectors
  • Cathodolumenescence Detectors
  • X-ray Detectors: Energy Dispersive and Wavelength Dispersive Spectrometers

Imaging Techniques

• Topographic Imaging
• Compositional Imaging with Wavelength Dispersive Spectrometry
• Cathodolumenescence Imaging

Quantitative Analysis

• Wavelength and Energy Dispersive Techniques
• Background and Peak Overlap Corrections
• Light Element Analysis

Goldstein, J. I., D. E. Newbury, P. Echlin, D. C. Joy, A. D. Jr. Romig, C. E. Lyman, C. Fiori, and E. Lifshin. Scanning Electron Microscopy and X-ray Microanalysis: A Text for Biologists, Material Scientists, and Geologists (Second Edition). New York: Plenum Press, 1992.
   

Reed, S. J. B. Electron Microprobe Analysis and Scanning Electron Microscopy in Geology. Cambridge, UK: Cambridge Univ. Press, 1996.

Scott, V. D., G. Love, and S. J. B. Reed. Quantitative Electron-Probe Microanalysis (Second Edition). New York: Ellis-Horwood, 1995.