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Measuring thickness in thin NbN films for superconducting devices

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Author(s)
Medeiros, Owen
•
Colangelo, Marco
•
Charaev, Ilya
•
Berggren, Karl K
Date Issued
2019
Journal
Journal of Vacuum Science and Technology A Vacuum Surfaces and Films
Publisher
American Vacuum Society
Version
Author's final manuscript
Abstract
© 2019 Author(s). The authors present the use of a commercially available fixed-angle multiwavelength ellipsometer for quickly measuring the thickness of NbN thin films for the fabrication and performance improvement of superconducting nanowire single photon detectors. The process can determine the optical constants of absorbing thin films, removing the need for inaccurate approximations. The tool can be used to observe oxidation growth and allows thickness measurements to be integrated into the characterization of various fabrication processes.
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
10.1116/1.5088061
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