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Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact
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3af53426a9384fc3747716d301cbf4e378df.pdf
Description
Published version
Size
696.26 KB
Format
Adobe PDF
Checksum (MD5)
22cfc88b8507324995f70ec466cb5221
Author(s) • • • • • • • •
Laine, Hannu S.
Vahlman, Henri
Haarahiltunen, Antti
Jensen, Mallory A.
Modanese, Chiara
Wagner, Matthias
Wolny, Franziska
Buonassisi, Tonio
Savin, Hele
Date Issued
2018
Publisher
Author(s)
Citation
Laine, Hannu S., Vahlman, Henri, Haarahiltunen, Antti, Jensen, Mallory A., Modanese, Chiara et al. 2018. "Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact." 1999.
Version
Final published version
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
10.1063/1.5049255