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Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact

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sword-2020-06-24T18:30:48.original.xml (130 B)
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Author(s)
Laine, Hannu S.
•
Vahlman, Henri
•
Haarahiltunen, Antti
•
Jensen, Mallory A.
•
Modanese, Chiara
•
Wagner, Matthias
•
Wolny, Franziska
•
Buonassisi, Tonio
•
Savin, Hele
Date Issued
2018
Publisher
Author(s)
Citation
Laine, Hannu S., Vahlman, Henri, Haarahiltunen, Antti, Jensen, Mallory A., Modanese, Chiara et al. 2018. "Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact." 1999.
Version
Final published version
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
https://hdl.handle.net/1721.1/136720
DOI of Published Version
10.1063/1.5049255
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