Application of quantum chemistry calculations in modeling chemical vapor deposition processes

Author(s)
Simka, Harsono Siem, 1969-
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Advisor
Klavs F. Jensen.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998.
 
Includes bibliographical references.
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/10065
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
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