Show simple item record

dc.contributor.advisorKarl K. Berggren.en_US
dc.contributor.authorOser, Kameron Len_US
dc.contributor.otherMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.en_US
dc.date.accessioned2016-01-04T20:53:44Z
dc.date.available2016-01-04T20:53:44Z
dc.date.copyright2014en_US
dc.date.issued2015en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/100689
dc.descriptionThesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, February 2015.en_US
dc.description"September 2014." Cataloged from student-submitted PDF version of thesis.en_US
dc.descriptionIncludes bibliographical references (pages 54-58).en_US
dc.description.abstractThe doubling of block copolymer (BCP) line patterns by electron-beam-fabricated template patterns is presented. Difficulties in achieving low defect self-assembly within the narrow line patterns are discussed. To address these issues, experimental approaches were investigated of narrowing the polymer's minority block through solvent annealing, and adjusting length of the polymer brush responsible for functionalizing the template lines. While narrowed polymer lines were not achieved through solvent annealing, low defect self-assembly of BCP within doubling template patterns was achieved by utilizing a polymer brush of high molecular weight (28 kg mol -1).en_US
dc.description.statementofresponsibilityby Kameron L. Oser.en_US
dc.format.extent58 pagesen_US
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582en_US
dc.subjectElectrical Engineering and Computer Science.en_US
dc.titleDoubling of block copolymer line patterns by electron-beam-fabricated templatesen_US
dc.title.alternativeDoubling of BCP line patterns by electron-beam-fabricated templatesen_US
dc.typeThesisen_US
dc.description.degreeM. Eng.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
dc.identifier.oclc933249791en_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record