Roadmap of mechanical systems design for the semiconductor automatic test equipment industry
Author(s)Chiu, Michael Alec, 1968-
Alexander H. Slocum.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.Vita.Includes bibliographical references (p. 291-294).
DepartmentMassachusetts Institute of Technology. Department of Mechanical Engineering
Massachusetts Institute of Technology