Roadmap of mechanical systems design for the semiconductor automatic test equipment industry

Author(s)
Chiu, Michael Alec, 1968-
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Advisor
Alexander H. Slocum.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
 
Vita.
 
Includes bibliographical references (p. 291-294).
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/10073
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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