dc.contributor.advisor | Alexander H. Slocum. | en_US |
dc.contributor.author | Chiu, Michael Alec, 1968- | en_US |
dc.date.accessioned | 2005-08-19T12:00:00Z | en_US |
dc.date.available | 2005-08-19T12:00:00Z | en_US |
dc.date.copyright | 1998 | en_US |
dc.date.issued | 1998 | en_US |
dc.identifier.uri | http://hdl.handle.net/1721.1/10073 | |
dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. | en_US |
dc.description | Vita. | en_US |
dc.description | Includes bibliographical references (p. 291-294). | en_US |
dc.description.statementofresponsibility | by Michael Alec Chiu. | en_US |
dc.format.extent | 295 p. | en_US |
dc.format.extent | 20937933 bytes | |
dc.format.extent | 20937689 bytes | |
dc.format.mimetype | application/pdf | |
dc.format.mimetype | application/pdf | |
dc.language.iso | eng | en_US |
dc.publisher | Massachusetts Institute of Technology | en_US |
dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
dc.subject | Mechanical Engineering | en_US |
dc.title | Roadmap of mechanical systems design for the semiconductor automatic test equipment industry | en_US |
dc.type | Thesis | en_US |
dc.description.degree | Ph.D. | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
dc.identifier.oclc | 39241898 | en_US |