Interferometric lithography and selected applications
Author(s)
Farhoud, Maya S. (Maya Sami)![Thumbnail](/bitstream/handle/1721.1/10457/37658981-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
Henry I. Smith.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. Includes bibliographical references (leaves 52-53).
Date issued
1997Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science