DLTS characterization of aluminum gettering of iron contaminants in boron-doped silicon
Author(s)
Thienprasit, Jeanne A. (Jeanne Athya)
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Alternative title
Deep level transient spectrosopy of aluminum gettering of iron contaminants in boron-doped silicon.
Advisor
David K. Roylance.
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Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Physics, 1996. Includes bibliographical references.
Date issued
1996Department
Massachusetts Institute of Technology. Department of PhysicsPublisher
Massachusetts Institute of Technology
Keywords
Physics