A new modeling methodology combining engineering and statistical modeling methods : a semiconductor manufacturing application

Author(s)
Sharma, Vikas
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Advisor
Roy E Welsch, Steven D. Eppinger.
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Description
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.
 
Includes bibliographical references (leaves 120-125).
 
Date issued
1996
URI
http://hdl.handle.net/1721.1/10686
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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