| dc.contributor.advisor | Roy E Welsch, Steven D. Eppinger. | en_US |
| dc.contributor.author | Sharma, Vikas | en_US |
| dc.date.accessioned | 2005-08-18T17:48:12Z | |
| dc.date.available | 2005-08-18T17:48:12Z | |
| dc.date.copyright | 1996 | en_US |
| dc.date.issued | 1996 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/10686 | |
| dc.description | Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996. | en_US |
| dc.description | Includes bibliographical references (leaves 120-125). | en_US |
| dc.description.statementofresponsibility | by Vikas Sharma. | en_US |
| dc.format.extent | 131 leaves | en_US |
| dc.format.extent | 11239192 bytes | |
| dc.format.extent | 11238953 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Mechanical Engineering | en_US |
| dc.title | A new modeling methodology combining engineering and statistical modeling methods : a semiconductor manufacturing application | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Sc.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 36398826 | en_US |
