A simulation-based study of the cost and performance trade-offs in a semiconductor IC manufacturing facility
Author(s)
Johal, Sumer S. (Sumer Singh)
DownloadFull printable version (8.964Mb)
Advisor
Stephen Graves.
Terms of use
Metadata
Show full item recordDescription
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. Includes bibliographical references (p. 140).
Date issued
1996Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science