Chemistry and physics of metallic contaminants on crystalline silicon surfaces

Author(s)
Norga, Gerd Johan Maria
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Advisor
Lionel G. Kimerling.
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Description
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
 
Includes bibliographical references (leaves 202-210).
 
Date issued
1996
URI
http://hdl.handle.net/1721.1/10904
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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