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Chemistry and physics of metallic contaminants on crystalline silicon surfaces

dc.contributor.advisorLionel G. Kimerling.en_US
dc.contributor.authorNorga, Gerd Johan Mariaen_US
dc.date.accessioned2005-08-18T15:09:42Z
dc.date.available2005-08-18T15:09:42Z
dc.date.copyright1996en_US
dc.date.issued1996en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/10904
dc.descriptionThesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.en_US
dc.descriptionIncludes bibliographical references (leaves 202-210).en_US
dc.description.statementofresponsibilityby Gerd Johan Maria Norga.en_US
dc.format.extent210 leavesen_US
dc.format.extent13034843 bytes
dc.format.extent13034598 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectMaterials Science and Engineeringen_US
dc.titleChemistry and physics of metallic contaminants on crystalline silicon surfacesen_US
dc.typeThesisen_US
dc.description.degreeSc.D.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Materials Science and Engineering
dc.identifier.oclc35649892en_US


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