Electrostatically actuated microelectromechanical test structures for material property measurement

Author(s)
Osterberg, Peter Maynard
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Advisor
Stephen D. Senturia.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
 
Includes bibliographical references (leaves 140-143).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/11097
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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