| dc.contributor.advisor | Stephen D. Senturia. | en_US |
| dc.contributor.author | Osterberg, Peter Maynard | en_US |
| dc.date.accessioned | 2005-08-17T23:22:31Z | |
| dc.date.available | 2005-08-17T23:22:31Z | |
| dc.date.copyright | 1995 | en_US |
| dc.date.issued | 1995 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/11097 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. | en_US |
| dc.description | Includes bibliographical references (leaves 140-143). | en_US |
| dc.description.statementofresponsibility | by Peter Maynard Osterberg. | en_US |
| dc.format.extent | 172 leaves | en_US |
| dc.format.extent | 10070063 bytes | |
| dc.format.extent | 10069824 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | Electrostatically actuated microelectromechanical test structures for material property measurement | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 34097554 | en_US |
