Process integration of erbium-doped silicon light-emitting diodes and MOSFETs

Author(s)
Zheng, Bo
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Advisor
Lionel C. Kimerling.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
 
Includes bibliographical references (leaves 146-152).
 
Date issued
1996
URI
http://hdl.handle.net/1721.1/11249
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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