Characterization of perfluorocompound emission and abatement kinetics in plasma processes

Author(s)
Mohindra, Vivek
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Advisor
Herbert H. Swain.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996.
 
Includes bibliographical references (leaves 136-142).
 
Date issued
1996
URI
http://hdl.handle.net/1721.1/11264
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
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