Show simple item record

Characterization of perfluorocompound emission and abatement kinetics in plasma processes

dc.contributor.advisorHerbert H. Swain.en_US
dc.contributor.authorMohindra, Viveken_US
dc.date.accessioned2005-08-18T12:00:00Zen_US
dc.date.available2005-08-18T12:00:00Zen_US
dc.date.copyright1996en_US
dc.date.issued1996en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/11264
dc.descriptionThesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996.en_US
dc.descriptionIncludes bibliographical references (leaves 136-142).en_US
dc.description.statementofresponsibilityby Vivek Mohindra.en_US
dc.format.extent188 leavesen_US
dc.format.extent12324346 bytes
dc.format.extent12324104 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectChemical Engineeringen_US
dc.titleCharacterization of perfluorocompound emission and abatement kinetics in plasma processesen_US
dc.typeThesisen_US
dc.description.degreePh.D.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Chemical Engineering
dc.identifier.oclc34791354en_US


Files in this item

Thumbnail
Name:
34791354-MIT.pdf
Size:
11.75Mb
Format:
PDF
Description:
Full printable version
View/Open

This item appears in the following Collection(s)

Show simple item record