Electromigration failure and reliability of single-crystal and polycyrstalline aluminum interconnects for integrated circuits
Author(s)
Joo, Young-Chang
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Advisor
Carl V. Thompson.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. Includes bibliographical references (leaves 206-216).
Date issued
1995Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering