Free-standing 100 nm period gratings produced by achromatic holographic lithography

Author(s)
Shah, Satyen N. (Satyen Navin)
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Advisor
Henry I. Smith.
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Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
 
Includes bibliographical references (leaf 44).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/11466
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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