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Free-standing 100 nm period gratings produced by achromatic holographic lithography

dc.contributor.advisorHenry I. Smith.en_US
dc.contributor.authorShah, Satyen N. (Satyen Navin)en_US
dc.date.accessioned2005-08-17T18:48:25Z
dc.date.available2005-08-17T18:48:25Z
dc.date.copyright1995en_US
dc.date.issued1995en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/11466
dc.descriptionThesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.en_US
dc.descriptionIncludes bibliographical references (leaf 44).en_US
dc.description.statementofresponsibilityby Satyen N. Shah.en_US
dc.format.extent44 leavesen_US
dc.format.extent2918364 bytes
dc.format.extent2918124 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectElectrical Engineering and Computer Scienceen_US
dc.titleFree-standing 100 nm period gratings produced by achromatic holographic lithographyen_US
dc.typeThesisen_US
dc.description.degreeM.Eng.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
dc.identifier.oclc33351689en_US


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