Show simple item record

dc.contributor.advisorSang-Gook Kim.en_US
dc.contributor.authorXu, Ruize, Ph. D. Massachusetts Institute of Technologyen_US
dc.contributor.otherMassachusetts Institute of Technology. Department of Mechanical Engineering.en_US
dc.date.accessioned2018-05-23T16:29:41Z
dc.date.available2018-05-23T16:29:41Z
dc.date.copyright2018en_US
dc.date.issued2018en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/115673
dc.descriptionThesis: Ph. D., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2018.en_US
dc.descriptionCataloged from PDF version of thesis.en_US
dc.descriptionIncludes bibliographical references (pages 187-195).en_US
dc.description.abstractVibration energy harvesters work effectively only when the operating conditions match with the available vibration source. Typical resonating MEMS structures cannot be used with low-frequency, low-amplitude and unpredictable nature of ambient vibrations. Bi-stable nonlinear oscillator based energy harvesters are developed for lowering the operating frequency while widening the bandwidth, and are realized at MEMS scale for the first time. This design concept does not rely on the resonance of the MEMS structure but operates with the large snapping motion of the beam at very low frequencies when proper conditions are provided to overcome the energy barrier between the two energy wells of the structure. A fully functional piezoelectric MEMS energy harvester is designed, monolithically fabricated and tested. An electromechanical lumped parameter model is developed to analyze the nonlinear dynamics and to guide the design of the multi-layer buckled beam structure. Residual stress induced buckling is achieved through the progressive control of the deposition along the fabrication steps. Static surface profile of the released device shows bi-stable buckling of 200 [mu]m which matches very well with the design. Dynamic testing demonstrates the energy harvester operates with 35% bandwidth under 70Hz at 0.5g, operating conditions that have not been met before by MEMS vibration energy harvesters.en_US
dc.description.statementofresponsibilityby Ruize Xu.en_US
dc.format.extent195 pagesen_US
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsMIT theses are protected by copyright. They may be viewed, downloaded, or printed from this source but further reproduction or distribution in any format is prohibited without written permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582en_US
dc.subjectMechanical Engineering.en_US
dc.titleLow-frequency, low-amplitude MEMS vibration energy harvestingen_US
dc.title.alternativeLow-frequency, low-amplitude micro electro mechanical systems vibration energy harvestingen_US
dc.typeThesisen_US
dc.description.degreePh. D.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Mechanical Engineering
dc.identifier.oclc1036985555en_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record