An aligner for X-ray nanolithography

Author(s)
Moel Modiano, Alberto
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Advisor
Henry I. Smith.
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Description
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993.
 
Includes bibliographical references (leaves 159-172).
 
Date issued
1993
URI
http://hdl.handle.net/1721.1/11991
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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