| dc.contributor.advisor | Henry I. Smith. | en_US |
| dc.contributor.author | Moel Modiano, Alberto | en_US |
| dc.date.accessioned | 2005-08-16T21:44:15Z | |
| dc.date.available | 2005-08-16T21:44:15Z | |
| dc.date.copyright | 1993 | en_US |
| dc.date.issued | 1993 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/11991 | |
| dc.description | Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993. | en_US |
| dc.description | Includes bibliographical references (leaves 159-172). | en_US |
| dc.description.statementofresponsibility | by Albert Moel Modiano. | en_US |
| dc.format.extent | 172 leaves | en_US |
| dc.format.extent | 10703636 bytes | |
| dc.format.extent | 10703394 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | An aligner for X-ray nanolithography | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Sc.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 31178823 | en_US |
