Focused ion beam induced deposition of copper

Author(s)
Della Ratta, Anthony D. (Anthony David)
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Advisor
John Melngailis and Carl V. Thompson.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1993.
 
Includes bibliographical references (leaves 94-97).
 
Date issued
1993
URI
http://hdl.handle.net/1721.1/12418
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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