| dc.contributor.advisor | John Melngailis and Carl V. Thompson. | en_US |
| dc.contributor.author | Della Ratta, Anthony D. (Anthony David) | en_US |
| dc.date.accessioned | 2005-08-15T23:29:00Z | |
| dc.date.available | 2005-08-15T23:29:00Z | |
| dc.date.copyright | 1993 | en_US |
| dc.date.issued | 1993 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/12418 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1993. | en_US |
| dc.description | Includes bibliographical references (leaves 94-97). | en_US |
| dc.description.statementofresponsibility | by Anthony D. Della Ratta. | en_US |
| dc.format.extent | 97 leaves | en_US |
| dc.format.extent | 5909298 bytes | |
| dc.format.extent | 5909054 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Materials Science and Engineering | en_US |
| dc.title | Focused ion beam induced deposition of copper | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Materials Science and Engineering | |
| dc.identifier.oclc | 29550831 | en_US |
