Silicon micromachined wafer-bonded valves

Author(s)
Huff, Michael Allan
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Advisor
Martin A. Schmidt.
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/12727 http://dspace.mit.edu/handle/1721.1/7582
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993.
 
Includes bibliographical references (v. 2, leaves 429-436).
 
Date issued
1993
URI
http://dspace.mit.edu/handle/1721.1/12727
http://hdl.handle.net/1721.1/12727
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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