Growth, characterization and thermal stability of undoped and in-situ doped silicon-germanium heteroepitaxial layers

Author(s)
Jang, Syun-Ming
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Advisor
Rafael Reif.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1993.
 
Includes bibliographical references (leaves 186-196).
 
Date issued
1993
URI
http://hdl.handle.net/1721.1/12744
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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