Design and fabrication of a thin film micromachined accelerometer

Author(s)
Novack, Mitchell J. (Mitchell Joseph)
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Advisor
Martin A. Schmidt.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992.
 
Includes bibliographical references (leaves 156-160).
 
Date issued
1992
URI
http://hdl.handle.net/1721.1/12917
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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