Design and fabrication of a thin film micromachined accelerometer
Author(s)
Novack, Mitchell J. (Mitchell Joseph)
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Advisor
Martin A. Schmidt.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992. Includes bibliographical references (leaves 156-160).
Date issued
1992Department
Massachusetts Institute of Technology. Department of Mechanical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering