| dc.contributor.advisor | Martin A. Schmidt. | en_US |
| dc.contributor.author | Novack, Mitchell J. (Mitchell Joseph) | en_US |
| dc.date.accessioned | 2005-08-15T19:43:07Z | |
| dc.date.available | 2005-08-15T19:43:07Z | |
| dc.date.copyright | 1992 | en_US |
| dc.date.issued | 1992 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/12917 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992. | en_US |
| dc.description | Includes bibliographical references (leaves 156-160). | en_US |
| dc.description.statementofresponsibility | by Mitchell J. Novack. | en_US |
| dc.format.extent | 160 leaves | en_US |
| dc.format.extent | 7892045 bytes | |
| dc.format.extent | 7891799 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Mechanical Engineering | en_US |
| dc.title | Design and fabrication of a thin film micromachined accelerometer | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 27911130 | en_US |
