A study of suspended-membrane and acoustic techniques for the determination of the mechanical properties of thin polymer films

Author(s)
Pan, Jeffrey Yen
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Advisor
Stephen D. Senturia.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992.
 
Includes bibliographical references (leaves 109-116).
 
Date issued
1992
URI
http://hdl.handle.net/1721.1/13075
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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