Metalorganic chemical vapor deposition of aluminum nitride and gallium nitride
Author(s)
Ho, Kwok-Lun
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Advisor
Klaus F. Jensen.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992. Includes bibliographical references (leaves 147-152).
Date issued
1992Department
Massachusetts Institute of Technology. Department of Chemical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering