Metalorganic chemical vapor deposition of aluminum nitride and gallium nitride

Author(s)
Ho, Kwok-Lun
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Advisor
Klaus F. Jensen.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.
 
Includes bibliographical references (leaves 147-152).
 
Date issued
1992
URI
http://hdl.handle.net/1721.1/13142
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
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