Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2
Author(s)Gray, David Charles
Herbert H. Sawin.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.Includes bibliographical references (p. 376-384).
DepartmentMassachusetts Institute of Technology. Dept. of Chemical Engineering
Massachusetts Institute of Technology