Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2

Author(s)
Gray, David Charles
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Advisor
Herbert H. Sawin.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.
 
Includes bibliographical references (p. 376-384).
 
Date issued
1992
URI
http://hdl.handle.net/1721.1/13187
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
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