| dc.contributor.advisor | Herbert H. Sawin. | en_US |
| dc.contributor.author | Gray, David Charles | en_US |
| dc.date.accessioned | 2005-08-15T16:47:04Z | |
| dc.date.available | 2005-08-15T16:47:04Z | |
| dc.date.copyright | 1992 | en_US |
| dc.date.issued | 1992 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/13187 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992. | en_US |
| dc.description | Includes bibliographical references (p. 376-384). | en_US |
| dc.description.statementofresponsibility | by David Charles Gray. | en_US |
| dc.format.extent | 618 p. | en_US |
| dc.format.extent | 32344656 bytes | |
| dc.format.extent | 32344412 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Chemical Engineering | en_US |
| dc.title | Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2 | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Chemical Engineering | |
| dc.identifier.oclc | 26680838 | en_US |
