Modeling, optimization, and control of spatial uniformity in manufacturing processes

Author(s)
Guo, Ruey-Shan
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Advisor
Emanuel Sachs.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1991.
 
Includes bibliographical references (leaves 105-109).
 
Date issued
1991
URI
http://hdl.handle.net/1721.1/13459
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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