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The reaction of molecular fluorine with silicon(100) : adsorption, desorption, and scattering dynamics

dc.contributor.advisorSylvia T. Ceyer.
dc.contributor.authorSchulberg, Michelle Tobi.en_US
dc.date.accessioned2021-12-17T18:02:04Z
dc.date.available2021-12-17T18:02:04Z
dc.date.copyright1990en_US
dc.date.issued1990en_US
dc.identifier.urihttps://hdl.handle.net/1721.1/138564
dc.descriptionThesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1990en_US
dc.descriptionIncludes bibliographical references.en_US
dc.description.statementofresponsibilityby Michelle Tobi Schulberg.en_US
dc.format.extent272 leavesen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsMIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582en_US
dc.subjectChemistryen_US
dc.titleThe reaction of molecular fluorine with silicon(100) : adsorption, desorption, and scattering dynamicsen_US
dc.typeThesisen_US
dc.description.degreePh. D.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Chemistryen_US
dc.identifier.oclc24079776en_US
dc.description.collectionPh. D. Massachusetts Institute of Technology, Department of Chemistryen_US
dspace.imported2021-12-17T18:02:04Zen_US
mit.thesis.degreeDoctoralen_US
mit.thesis.departmentChemen_US


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