Microfabricated silicon electric mechanisms

Author(s)
Mehregany, Mehran
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Stephen D. Senturia.
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.
 
Includes bibliographical references (leaves 151-156).
 
Date issued
1990
URI
http://hdl.handle.net/1721.1/14042
Department
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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