Microfabricated silicon electric mechanisms
Author(s)
Mehregany, Mehran
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Other Contributors
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Stephen D. Senturia.
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Metadata
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990. Includes bibliographical references (leaves 151-156).
Date issued
1990Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.