Microfabricated silicon electric mechanisms

Author(s)
Mehregany, Mehran
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Stephen D. Senturia.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.
 
Includes bibliographical references (leaves 151-156).
 
Date issued
1990
URI
http://hdl.handle.net/1721.1/14042
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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