| dc.contributor.advisor | Stephen D. Senturia. | en_US |
| dc.contributor.author | Mehregany, Mehran | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. | en_US |
| dc.date.accessioned | 2005-08-10T19:16:55Z | |
| dc.date.available | 2005-08-10T19:16:55Z | |
| dc.date.copyright | 1990 | en_US |
| dc.date.issued | 1990 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/14042 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990. | en_US |
| dc.description | Includes bibliographical references (leaves 151-156). | en_US |
| dc.description.statementofresponsibility | by Mehran Mehregany. | en_US |
| dc.format.extent | 181 leaves | en_US |
| dc.format.extent | 11500595 bytes | |
| dc.format.extent | 11500351 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science. | en_US |
| dc.title | Microfabricated silicon electric mechanisms | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 23292188 | en_US |
