Controlled and explosive silicidation of metal/amorphous-silicon multilayer thin films

Author(s)
Clevenger, Lawrence Alfred
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Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Advisor
Carl V. Thompson.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1989.
 
Includes bibliographical references.
 
Date issued
1989
URI
http://hdl.handle.net/1721.1/14210
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering.
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