Measurement of adhesion and mechanical properties of thin films using microfabricated structures

Author(s)
Allen, Mark George
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Massachusetts Institute of Technology. Dept. of Chemical Engineering.
Advisor
Stephen D. Senturia.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1989.
 
Includes bibliographical references (leaves 188-193).
 
Date issued
1989
URI
http://hdl.handle.net/1721.1/14329
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering.
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