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Measurement of adhesion and mechanical properties of thin films using microfabricated structures

dc.contributor.advisorStephen D. Senturia.en_US
dc.contributor.authorAllen, Mark Georgeen_US
dc.contributor.otherMassachusetts Institute of Technology. Dept. of Chemical Engineering.en_US
dc.date.accessioned2005-08-10T15:49:26Z
dc.date.available2005-08-10T15:49:26Z
dc.date.copyright1989en_US
dc.date.issued1989en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/14329
dc.descriptionThesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1989.en_US
dc.descriptionIncludes bibliographical references (leaves 188-193).en_US
dc.description.statementofresponsibilityby Mark George Allen.en_US
dc.format.extent193 leavesen_US
dc.format.extent13883150 bytes
dc.format.extent13882908 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectChemical Engineering.en_US
dc.titleMeasurement of adhesion and mechanical properties of thin films using microfabricated structuresen_US
dc.typeThesisen_US
dc.description.degreePh.D.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Chemical Engineering
dc.identifier.oclc21885566en_US


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