Characterization of chemical vapor deposited polycrystalline silicon thin films

Author(s)
Hajjar, Jean-Jacques Joseph
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
L. Rafael Reif and David Adler.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1986.
 
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Bibliography: leaves 134-139.
 
Date issued
1986
URI
http://hdl.handle.net/1721.1/15006
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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