Characterization of chemical vapor deposited polycrystalline silicon thin films
Author(s)
Hajjar, Jean-Jacques Joseph
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
L. Rafael Reif and David Adler.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1986. MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING Bibliography: leaves 134-139.
Date issued
1986Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.