Electron beam techniques for testing and restructuring of wafer-scale integrated circuits

Author(s)
Shaver, David Carl.
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Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
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Description
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 1981
 
Includes bibliographical references.
 
Date issued
1981
URI
https://hdl.handle.net/1721.1/154969
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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